微电子工业生产废水处理及回收利用
收稿日期: 2001-06-05
网络出版日期: 2010-10-01
Treatment and reclamation utilization of the wastewater in microelectronic industry
Received date: 2001-06-05
Online published: 2010-10-01
胡伟林 . 微电子工业生产废水处理及回收利用[J]. 工业水处理, 2001 , 21(12) : 40 -41 . DOI: 10.11894/1005-829x.2001.21(12).40
The treatment process of the wastewater that is produced in the microeletronic industry chip manufacture field is expounded,including fluoride wastewater and silica grind wastewater and the high acid and caustic concentration wastewater coming from the mixed bed regeneration in the D.I system,and specially do the brave experiment to the wastewater containing F-.An obvious effect has been achieved.The treated wastewater has been used as cooling water of the process equipment and power equipment,and it obviously benefits the economy and society.
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