基于膜吸收法处理实际高浓度蚀刻废液的研究
Treatment of actual high concentration etching solution based on membrane absorption method
1—蠕动泵；2—吸收液储槽；3—PP中空纤维膜组件；4—料液储槽；5—料液出水槽。
基于膜吸收法处理实际高浓度蚀刻废液的研究 |
| 刘华光, 任亚涛, 赵子龙, 王宏杰, 董文艺, 侯惠惠 |
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Treatment of actual high concentration etching solution based on membrane absorption method |
| Huaguang LIU, Yatao REN, Zilong ZHAO, Hongjie WANG, Wenyi DONG, Huihui HOU |
| 图1 膜吸收工艺装置 1—蠕动泵；2—吸收液储槽；3—PP中空纤维膜组件；4—料液储槽；5—料液出水槽。 |
| Fig. 1 Membrane absorption process device |
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