基于膜吸收法处理实际高浓度蚀刻废液的研究
Treatment of actual high concentration etching solution based on membrane absorption method
基于膜吸收法处理实际高浓度蚀刻废液的研究 |
| 刘华光, 任亚涛, 赵子龙, 王宏杰, 董文艺, 侯惠惠 |
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Treatment of actual high concentration etching solution based on membrane absorption method |
| Huaguang LIU, Yatao REN, Zilong ZHAO, Hongjie WANG, Wenyi DONG, Huihui HOU |
| 图5 吸收液浓度对ARR、K和J的影响 |
| Fig. 5 Effect of absorption solution concentration on ammonia removal rate，mass transfer coefficient and transmembrane flux |
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