基于膜吸收法处理实际高浓度蚀刻废液的研究

刘华光, 任亚涛, 赵子龙, 王宏杰, 董文艺, 侯惠惠

Treatment of actual high concentration etching solution based on membrane absorption method

Huaguang LIU, Yatao REN, Zilong ZHAO, Hongjie WANG, Wenyi DONG, Huihui HOU

表2 蚀刻废液水质特性

Table 2 Characteristics of etching waste solution

水质指标 COD NH4+-N TP pH Cu Mg Ni Fe Zn 范围 180~200 78 000~86 000 3~5 7.4~7.8 27~30 0.7~0.8 — — 0.4~0.5 平均值 186 83 260 3.6 7.6 28.9 0.73 — — 0.47