试验研究

用电去离子方法去除高纯水中硅的研究

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  • 1. 同济大学环境科学与工程学院, 上海 200092;
    2. 华东建筑设计研究院有限公司, 上海 200002;
    3. 北京钢铁设计总院, 北京 100053
闻瑞梅(1933- ),1955年毕业于武汉大学化学系,现任上海同济大学教授,博士生导师.电话:021-65982310,E-mail:zyf0403@ecadi.com

收稿日期: 2004-04-27

  网络出版日期: 2010-10-01

Study of silicon removal from ultra-pure water by electrodeionization

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  • 1. School of Environmental Science and Engineering, Tongji University, Shanghai 200092, China;
    2. East China Architectural Design & Research Institute Co., Ltd., Shanghai 200002, China;
    3. Beijing Central Engineering & Research Incorporation, Beijing 100053, China

Received date: 2004-04-27

  Online published: 2010-10-01

摘要

研究了电压、pH、流量等因素对EDI去除高纯水中硅的影响,探讨了EDI装置对高纯水中硅的去除机理,并对传统工艺与EDI的除硅效果进行了对比。实验结果表明:在pH、流量等因素不变的情况下,电压的增加有利于EDI对硅的脱除;在电压、流量等因素不变的情况下,EDI对硅的脱除率随着pH的增加先增加,然后有所下降;在电压、pH等因素不变的情况下,流量的增加不利于EDI对硅的脱除。

关键词: 电去离子; ; 高纯水

本文引用格式

闻瑞梅, 张亚峰, 邓守权, 范伟 . 用电去离子方法去除高纯水中硅的研究[J]. 工业水处理, 2004 , 24(10) : 27 -29 . DOI: 10.11894/1005-829x.2004.24(10).27

Abstract

The silicon removal from ultra-pure water by electrodeionization (EDI) is studied. The influences of applied voltage, pH values and flux during the EDI process on the silicon removal and the mechanism of the silicon removal by EDI in ultra-pure water are investigated. Moreover, the results of silicon removal by EDI are compared with those by traditional processes. These experimental results show: under conditions of the same pH values and flux, the efficiency of silicon removal can be improved by increasing EDI′s voltage; under conditions of the same voltage and flux, the efficiency of silicon removal increases firstly and then decreases a little with the pH values increasing; under conditions of the same voltage and pH values, it is not good for silicon removal to increase EDI flux.

参考文献

[1] 闻瑞梅,王在忠.高纯水的制备与检测技术[M].北京:科学出版社.1996.5-6
[2] Benoit Pare, Hango Roy A. Electrodeionization Replaces Aging Mixed Beds Serving Semiconductor Manufacturing [J]. Ultrapure Water, 2000, (7) :36- 39
[3] 沈健.电子工业高纯水技术进展[J].给水排水,1995,21(5):16-19
[4] 闻瑞梅,徐志彪,孟广祯,等.MOVPE生产用高纯水中硅的去除[J].电子学报,2003,31(5):721-723
[5] 邵磊,宋存义,胡永平,等.离子交换脱硅和阻垢剂抑制硅垢等方法[J].中国给水排水,2000,16(4):26-29

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