The treatment process of the wastewater that is produced in the microeletronic industry chip manufacture field is expounded,including fluoride wastewater and silica grind wastewater and the high acid and caustic concentration wastewater coming from the mixed bed regeneration in the D.I system,and specially do the brave experiment to the wastewater containing F-.An obvious effect has been achieved.The treated wastewater has been used as cooling water of the process equipment and power equipment,and it obviously benefits the economy and society.