Enhanced removal characteristics and research progress of hydrogen peroxide in electronic grade ultrapure water by group Ⅷ transition metals

doi:10.19965/j.cnki.iwt.2024-0114

Abstract

Abstract:

In the production process of electronic grade ultrapure water, trace H₂O₂ is mainly compounded by hydroxyl radicals generated by vacuum UV degradation devices, which can corrode certain specific processes of semiconductor materials surface cleaning. The application of multiphase nanocatalysation technology in advanced process semiconductor ultrapure water preparation system can effectively remove the micropollution H₂O₂ produced by vacuum ultraviolet irradiation, which is a green cleaning technology to promote the rapid dissociation of active oxygen species containing O—O bonds. The generation of micropollution H₂O₂ and its influence on the cleaning process of semiconductor materials were briefly discussed. The reaction pathway and mechanism of platinum series metal nanoparticles in group Ⅷ transition elements to catalyze H₂O₂ dissociation were analyzed. The effects of metal surface adsorption configuration, adsorption energy, electronic structure, carrier chemical properties, halogen anions in water and other factors on the enhanced removal characteristics of nanoparticles were also discussed. The application and research progress of group Ⅷ transition metals in ultrapure water production, detection and semiconductor assisted process systems were reviewed. The research provided reference for the construction of a new reaction system in ultrapure water process and the development and application of water treatment materials.

Key words: electronic grade ultrapure water, micropollution control, metal nanoparticles, decomposition activity

摘要：

在电子级超纯水的生产过程中，痕量H₂O₂主要由真空紫外线降解器产生的羟基自由基复合而成，会影响半导体材料清洗的某些特定工艺。将复相纳米催化技术应用于电子级超纯水制备系统，可以有效去除超纯水中微污染H₂O₂，是促进含O—O键活性氧物种快速解离的绿色清洁技术。简要阐述了微污染H₂O₂的产生及对半导体材料清洗工艺的影响，着重分析了Ⅷ族过渡元素中铂系金属纳米粒子对H₂O₂催化解离的反应途径和作用机理。还讨论了金属表面吸附构型、吸附能、电子结构以及载体化学性质、水中卤族阴离子等因素对纳米粒子强化去除特性的影响，综述了Ⅷ族过渡金属在超纯水生产、检测以及半导体工艺辅助系统的应用与研究进展，为超纯水新型反应体系的构建和水处理材料的研发及应用提供参考。

关键词: 电子级超纯水, 微污染控制, 金属纳米粒子, 分解活性

CLC Number:

TU991.2

Wei ZHENG, Wenlong WANG, Weibin NI, Xin WEN, Guangming YANG. Enhanced removal characteristics and research progress of hydrogen peroxide in electronic grade ultrapure water by group Ⅷ transition metals[J]. Industrial Water Treatment, 2024, 44(7): 57-66.

郑伟, 王文龙, 倪卫斌, 温鑫, 杨光明. Ⅷ族过渡金属对电子级超纯水H₂O₂强化去除特性与研究进展[J]. 工业水处理, 2024, 44(7): 57-66.

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URL: https://www.iwt.cn/EN/10.19965/j.cnki.iwt.2024-0114

https://www.iwt.cn/EN/Y2024/V44/I7/57

Figures/Tables 8

Table 1 Elementary reactions and rate constant values related to formation of H₂O₂ by UV irradiation

基元反应	速率常数	反应编号
H₂O+hν ₁₈₅ $→$ ·OH+H·	$Φ H 2 O$ =0.33 mol/mol	式（1）
H₂O+hν ₁₈₅ $→$ ·OH+H⁺+e_aq ^-	$Φ H 2 O$ =0.045 mol/mol	式（2）
·OH+·OH $→$ H₂O₂	k=4.2×10⁹ L/（mol·s）	式（3）
H·+O₂ $→$ HO₂·	k=1.2×10¹⁰ L/（mol·s）	式（4）
HO₂·+HO₂· $→$ H₂O₂+O₂	k=8.3×10⁵ L/（mol·s）	式（5）
O₂+e_aq ^- $→$ O₂ ^·-	k=1.8×10¹⁰ L/（mol·s）	式（6）
HO₂·+O₂ ^·-+H₂O $→$ O₂+H₂O₂+OH^-	k=9.7×10⁷ L/（mol·s）	式（7）
HO₂·+H·→H₂O₂	k=2.0×10¹⁰ L/（mol·s）	式（8）

Table 1 Elementary reactions and rate constant values related to formation of H₂O₂ by UV irradiation

基元反应	速率常数	反应编号
H₂O+hν ₁₈₅ $→$ ·OH+H·	$Φ H 2 O$ =0.33 mol/mol	式（1）
H₂O+hν ₁₈₅ $→$ ·OH+H⁺+e_aq ^-	$Φ H 2 O$ =0.045 mol/mol	式（2）
·OH+·OH $→$ H₂O₂	k=4.2×10⁹ L/（mol·s）	式（3）
H·+O₂ $→$ HO₂·	k=1.2×10¹⁰ L/（mol·s）	式（4）
HO₂·+HO₂· $→$ H₂O₂+O₂	k=8.3×10⁵ L/（mol·s）	式（5）
O₂+e_aq ^- $→$ O₂ ^·-	k=1.8×10¹⁰ L/（mol·s）	式（6）
HO₂·+O₂ ^·-+H₂O $→$ O₂+H₂O₂+OH^-	k=9.7×10⁷ L/（mol·s）	式（7）
HO₂·+H·→H₂O₂	k=2.0×10¹⁰ L/（mol·s）	式（8）

Fig.1 SiGe epi quality at radius distribution of the wafer

Fig.2 Schematic representation of reaction pathways for H₂O₂ decomposition on clean metal surfaces

Fig.3 Adsorption configurations of H₂O₂dissociation into H₂O on Pd（111） surface

Table 2 Elementary steps for hydrogenation of H₂O₂

基元步骤	步骤编号
H₂+* $→$ H₂*	5.1
H₂+ $→$ H+H	5.2
HOOH+ $→$ OH+OH	5.3
OH+OH+H* $→$ H₂O+OH+*	5.4
OH+H $→$ H₂O+	5.5
H₂O* $→$ H₂O+*	5.6

Table 2 Elementary steps for hydrogenation of H₂O₂

基元步骤	步骤编号
H₂+* $→$ H₂*	5.1
H₂+ $→$ H+H	5.2
HOOH+ $→$ OH+OH	5.3
OH+OH+H* $→$ H₂O+OH+*	5.4
OH+H $→$ H₂O+	5.5
H₂O* $→$ H₂O+*	5.6

Fig.4 Effect of different reaction media on decomposition of H₂O₂ on catalyst（at 25 ℃）

Table 3 Results of the H₂O₂ decomposition in two aqueous reaction mediums over Pd⁰ and PdO halide supported palladium catalysts

掺入卤化物	催化剂本体Pd的化学状态	H₂O₂分解效率/%
无（0.03 mol/L H₃PO₄）	PdO	3.4
无（0.03 mol/L H₃PO₄）	Pd⁰	23.5
F^-（0.03 mol/L H₃PO₄）	PdO	1.6
F^-（0.03 mol/L H₃PO₄）	Pd⁰	68.9
Cl^-（0.03 mol/L H₃PO₄）	PdO	1.3
Cl^-（0.03 mol/L H₃PO₄）	Pd⁰	30.9
Br^-（0.03 mol/L H₃PO₄）	PdO	1.0
Br^-（0.03 mol/L H₃PO₄）	Pd⁰	6.5
Br^-（纯水溶剂）	PdO	5.3
Br^-（纯水溶剂）	Pd⁰	87.5

Fig.5 Decomposition of H₂O₂ by two types of supported palladium resins

References 70

1	蔡涵颖，王文龙，吴乾元，等. 中国电子级超纯水自主化制备关键难题与解决思路［J］. 工业水处理，2023，43（6）：1-6.
	CAI Hanying， WANG Wenlong， WU Qianyuan，et al. Key problems and novel strategy of autonomous preparation for electronic-grade ultrapure water in China［J］. Industrial Water Treatment，2023，43（6）：1-6.
2	LI Mengkai， QIANG Zhimin， HOU Pin，et al. VUV/UV/chlorine as an enhanced advanced oxidation process for organic pollutant removal from water：Assessment with a novel mini-fluidic VUV/UV photoreaction system（MVPS）［J］. Environmental Science & Technology，2016，50（11）：5849-5856. doi:10.1021/acs.est.6b00133
3	PHILIPPE Rychen， JULIEN Magnan，OVIVO. Photolytic generation and catalytic degradation of hydrogen peroxide in ultra pure water［C］. Ultrapure water Micro Conference，2016.
4	村山雅美，矢野大作. フッ化水素酸水溶液の精製方法、基板処理方法および基板処理装置：JP6100664B2［P］. 2017-03-22.
5	娄宇，郑伟，杨光明，等. 纳米制程集成电路清洗水的制备方法：CN202211436541X［P］. 2023-04-07.
6	RASTEGAR A， HOUSE M， SAMAYOA M. Understanding UPW-induced particle defectivity in sub10 nm technology nodes［C］. Phoenix：Ultrapure Water Micro，2014. doi:10.1117/12.2048080
7	ZHANG Xinbo， YANG Yuanying， NGO H H，et al. A critical review on challenges and trend of ultrapure water production process［J］. The Science of the Total Environment，2021，785：147254. doi:10.1016/j.scitotenv.2021.147254
8	SEMI F063-0521 Guide For Ultrapure Water Used In Semiconductor Processing ［S］. doi:10.1109/asmc.2016.7491077
9	ABE T， NOMURA A， AMAYA T，et al. The deterioration of ultrapure water quality under the influence of hydrogen peroxide［J］. Journal of Ion Exchange，2003，14：273-276. doi:10.5182/jaie.14.supplement_273
10	胡龙兴，徐文超，吴文蕾. 分解过氧化氢的铁氧体催化剂的制备方法及其应用：CN110215924A［P］. 2019-09-10.
11	HIDEKI Kobayashi. Method and apparatus for removing hydrogen peroxide：WO2007081054A1［P］. 2007-01-11.
12	PLAUCK A， STANGLAND E E， DUMESIC J A，et al. Active sites and mechanisms for H₂O₂ decomposition over Pd catalysts［J］. Proceedings of the National Academy of Sciences of the United States of America，2016，113（14）：E1973-E1982. doi:10.1073/pnas.1602172113
13	森田博志，港康晴. 過酸化水素除去方法及び装置：JP6451824B2［P］. 2019-01-16.
14	CAI Hanying， WU Qianyuan， OUYANG Wanyue，et al. Efficient removal of electroneutral carbonyls by combined vacuum-UV oxidation and anion-exchange resin adsorption：Mechanism，model simulation，and optimization［J］. Water Research，2023，243：120435. doi:10.1016/j.watres.2023.120435
15	SERRANO MORA A， MOHSENI M. Temperature dependence of the absorbance of 185 nm photons by water and commonly occurring solutes and its influence on the VUV advanced oxidation process［J］. Environmental Science：Water Research & Technology，2018，4（9）：1303-1309. doi:10.1039/c8ew00302e
16	邵婉婷，王文龙，杜烨，等. 双波长紫外线（VUV/UV）对有机污染物强化去除特性与原理［J］. 环境科学研究，2021，34（6）：1397-1406.
	SHAO Wanting， WANG Wenlong， DU Ye，et al. Enhancement and synergism of VUV/UV irradiation on elimination of organic pollutants［J］. Research of Environmental Sciences，2021，34（6）：1397-1406.
17	BAGHERI M， MOHSENI M. A study of enhanced performance of VUV/UV process for the degradation of micropollutants from contaminated water［J］. Journal of Hazardous Materials，2015，294：1-8. doi:10.1016/j.jhazmat.2015.03.036
18	YANG Laxiang， LI Mengkai， LI Wentao，et al. A green method to determine VUV（185 nm） fluence rate based on hydrogen peroxide production in aqueous solution［J］. Photochemistry and Photobiology，2018，94（4）：821-824. doi:10.1111/php.12913
19	IMOBERDORF G， MOHSENI M. Modeling and experimental evaluation of vacuum-UV photoreactors for water treatment［J］. Chemical Engineering Science，2011，66（6）：1159-1167. doi:10.1016/j.ces.2010.12.020
20	BAGHERI M， MOHSENI M. Pilot-scale treatment of 1，4-dioxane contaminated waters using 185 nm radiation：Experimental and CFD modeling［J］. Journal of Water Process Engineering，2017，19：185-192. doi:10.1016/j.jwpe.2017.06.015
21	HAN D H， CHA S Y， YANG H Y. Improvement of oxidative decomposition of aqueous phenol by microwave irradiation in UV/H₂O₂ process and kinetic study［J］. Water Research，2004，38（11）：2782-2790. doi:10.1016/j.watres.2004.03.025
22	OUYANG Wanyue， WANG Wenlong， ZHANG Yilin，et al. VUV/UV oxidation performance for the elimination of recalcitrant aldehydes in water and its variation along the light-path［J］. Water Research，2023，228（Pt A）：119390. doi:10.1016/j.watres.2022.119390
23	MIYAZAKI Y. Advanced hydrogen peroxide removal technology using nano-sized Pt particle catalyst supported on anion exchange resin［C］. ULTRAPURE WATER Micro Conference，2013.
24	YANO D， MURAYAMA M， TAKAHASHI M，et al. Inhibition of copper dissolution by removal of oxidants from rinsing water using noble metal catalysts［C］.The 61st JSAP Spring Meeting. Aoyama Gakuin University，2014. doi:10.1149/ma2013-02/30/2113
25	TOKURI K， YAMASHITA Y， SHIOHARA M，et al. Effect of pattern layout and dissolved oxygen in CO₂ rinse water on Cu corrosion during post-etch cleaning［J］. Japanese Journal of Applied Physics，2010，49（5S2）：05FF04. doi:10.1143/jjap.49.05ff04
26	MASAOKA T， GAN N， FUJIMURA Y，et al. Effect of dilute hydrogen peroxide in ultrapure water on SiGe epitaxial process［J］. Solid State Phenomena，2016，255：27-30. doi:10.4028/www.scientific.net/ssp.255.27
27	段路强. 外延雾表面研究及设备改善［J］. 科技创新与应用，2018（21）：104-106.
	DUAN Luqiang. Study on epitaxial fog surface and improvement of equipment［J］. Technology Innovation and Application，2018（21）：104-106.
28	JOCHEN Ruth， GERD Heser， PHILIPPE Rychen，et al. Impact of H₂O₂ concentration in UPW on（Ultra） filters performance［C］. Ultrapure water Micro Conference，2023.
29	ZHU Jun， ZHOU Jinghong， ZHAO Tiejun，et al. Carbon nanofiber-supported palladium nanoparticles as potential recyclable catalysts for the Heck reaction［J］. Applied Catalysis A：General，2009，352（1/2）：243-250. doi:10.1016/j.apcata.2008.10.012
30	BRADU C， CĂPĂŢ C， PAPA F，et al. Pd-Cu catalysts supported on anion exchange resin for the simultaneous catalytic reduction of nitrate ions and reductive dehalogenation of organochlorinated pollutants from water［J］. Applied Catalysis A：General，2019，570：120-129. doi:10.1016/j.apcata.2018.11.002
31	LI Haodong， XIA Yuetong， WEN Langyou，et al. Preparation and application of functional resin-supported noble metal catalysts［J］. Petrochemical Technology，2021，50（1）：8.
32	HAN Bing， LIU Wen， LI Jingwen，et al. Catalytic hydrodechlorination of triclosan using a new class of anion-exchange-resin supported palladium catalysts［J］. Water Research，2017，120：199-210. doi:10.1016/j.watres.2017.04.059
33	郑伟，杨光明，程星华，等. 一种精处理回路提纯水的的系统：CN115893769B［P］. 2023-05-18.
34	郑伟，杨光明，程星华，等. 一种痕量微污染物的在线分析装置：CN202321604866.4［P］. 2023-06-21.
35	佐々木慶介，高桥一重，高桥悠介，等. 水処理方法及び装置：JP2022138429A［P］. 2022-09-26.
36	LOUSADA C M， JOHANSSON A J， BRINCK T，et al. Reactivity of metal oxide clusters with hydrogen peroxide and water：A DFT study evaluating the performance of different exchange-correlation functionals［J］. Physical Chemistry Chemical Physics：PCCP，2013，15（15）：5539-5552. doi:10.1039/c3cp44559c
37	LI Jun， STAYKOV A， ISHIHARA T，et al. Theoretical study of the decomposition and hydrogenation of H₂O₂ on Pd and Au@Pd surfaces：Understanding toward high selectivity of H₂O₂ synthesis［J］. The Journal of Physical Chemistry C，2011，115（15）：7392-7398. doi:10.1021/jp1070456
38	NTAINJUA N E， EDWARDS J K， CARLEY A F，et al. The role of the support in achieving high selectivity in the direct formation of hydrogen peroxide［J］. Green Chemistry，2008，10（11）：1162-1169. doi:10.1039/b809881f
39	CHOUDHARY V R， SAMANTA C， JANA P. Decomposition and/or hydrogenation of hydrogen peroxide over Pd/Al₂O₃ catalyst in aqueous medium：Factors affecting the rate of H₂O₂ destruction in presence of hydrogen［J］. Applied Catalysis A：General，2007，332（1）：70-78. doi:10.1016/j.apcata.2007.08.004
40	PAUNOVIC V， ORDOMSKY V V， SUSHKEVICH V L，et al. Direct synthesis of hydrogen peroxide over Au-Pd catalyst：The effect of co-solvent addition［J］. ChemCatChem，2015，7（7）：1161-1176. doi:10.1002/cctc.201500050
41	DEGUCHI T， YAMANO H， IWAMOTO M. Kinetic and mechanistic studies on direct H₂O₂ synthesis from H₂ and O₂ catalyzed by Pd in the presence of H⁺ and Br-in water：A comprehensive paper［J］. Catalysis Today，2015，248：80-90. doi:10.1016/j.cattod.2014.04.008
42	李新立. 氢氧直接合成过氧化氢的机理及动力学研究［D］. 郑州大学，2020.
	LI Xinli. Kinetics of direct synthesis of hydrogen peroxide from hydrogen and oxygen［D］. Zhengzhou University，2020.
43	SAMANTA C. Direct synthesis of hydrogen peroxide from hydrogen and oxygen：An overview of recent developments in the process［J］. Applied Catalysis A：General，2008，350（2）：133-149. doi:10.1016/j.apcata.2008.07.043
44	WILSON N M， PRIYADARSHINI P， KUNZ S，et al. Direct synthesis of H₂O₂ on Pd and Au _x Pd1 clusters：Understanding the effects of alloying Pd with Au［J］. Journal of Catalysis，2018，357：163-175. doi:10.1016/j.jcat.2017.10.028
45	KIM S， LEE D W， LEE K Y. Shape-dependent catalytic activity of palladium nanoparticles for the direct synthesis of hydrogen peroxide from hydrogen and oxygen［J］. Journal of Molecular Catalysis A：Chemical，2014，391：48-54. doi:10.1016/j.molcata.2014.03.026
46	TU Weifeng， LI Xinli， WANG Renquan，et al. Catalytic consequences of the identity of surface reactive intermediates during direct hydrogen peroxide formation on Pd particles［J］. Journal of Catalysis，2019，377：494-506. doi:10.1016/j.jcat.2019.07.047
47	郑伟. 超纯液相环境纳米金属催化降除多元微污染物特性与机理［J］. 给水排水，2024，50（1）：66-77.
	ZHENG Wei. Characteristics and mechanism of catalytic degradation of multiple micropollutants by nano-metals in ultra-pure water［J］. Water & Wastewater Engineering，2024，50（1）：66-77.
48	郑伟，程星华，杨光明，等. 先进芯片制造用清洗水的提纯装置与方法：CN115626745A［P］. 2023-05-12.
49	LANDON P， COLLIER P J， CARLEY A F，et al. Direct synthesis of hydrogen peroxide from H₂ and O₂ using Pd and Au catalysts［J］. Physical Chemistry Chemical Physics，2003，5（9）：1917-1923. doi:10.1039/b211338b
50	CHOUDHARY V， SAMANTA C. Role of chloride or bromide anions and protons for promoting the selective oxidation of H₂ by O₂ to H₂O₂ over supported Pd catalysts in an aqueous medium［J］. Journal of Catalysis，2006，238（1）：28-38. doi:10.1016/j.jcat.2005.11.024
51	BREHM J， LEWIS R J， MORGAN D J，et al. The direct synthesis of hydrogen peroxide over AuPd nanoparticles：An investigation into metal loading［J］. Catalysis Letters，2022，152（1）：254-262. doi:10.1007/s10562-021-03632-6
52	LIANG Hairui， WANG Li， LIU Guozhu. A review of recent development on catalysts for direct synthesis of hydrogen peroxide from hydrogen and oxygen［J］. Chemical Industry and Engineering Progress，2021，40（4）：2060-2069.
53	TIAN Pengfei， OUYANG Like， XU Xinchao，et al. Density functional theory study of direct synthesis of H₂O₂ from H₂ and O₂ on Pd（111），Pd（100），and Pd（110） surfaces［J］. Chinese Journal of Catalysis，2013，34（5）：1002-1012. doi:10.1016/s1872-2067(12)60537-3
54	EDWARDS J K， SOLSONA B， EDWIN NTAINJUA N，et al. Switching off hydrogen peroxide hydrogenation in the direct synthesis process［J］. Science，2009，323（5917）：1037-1041. doi:10.1126/science.1168980
55	CHINTA S. A mechanistic study of H₂O₂ and H₂O formation from H₂ and BO₂ catalyzed by palladium in an aqueous medium［J］. Journal of Catalysis，2004，225（1）：249-255. doi:10.1016/j.jcat.2004.04.014
56	EDWARDS J K， THOMAS A， SOLSONA B E，et al. Comparison of supports for the direct synthesis of hydrogen peroxide from H₂ and O₂ using Au-Pd catalysts［J］. Catalysis Today，2007，122（3/4）：397-402. doi:10.1016/j.cattod.2007.01.046
57	CHOUDHARY V R， SAMANTA C， CHOUDHARY T V. Factors influencing decomposition of H₂O₂ over supported Pd catalyst in aqueous medium［J］. Journal of Molecular Catalysis A：Chemical，2006，260（1/2）：115-120. doi:10.1016/j.molcata.2006.07.009
58	GAIKWAD A. Direct oxidation of hydrogen to hydrogen peroxide over Pd-containing fluorinated or sulfated Al₂O₃，ZrO₂，CeO₂，ThO₂，Y₂O₃ and Ga₂O₃ catalysts in stirred slurry reactor at ambient conditions［J］. Journal of Molecular Catalysis A：Chemical，2002，181（1/2）：143-149. doi:10.1016/s1381-1169(01)00359-4
59	CHOUDHARY V R， GAIKWAD A G， SANSARE S D. Activation of supported Pd metal catalysts for selective oxidation of hydrogen to hydrogen peroxide［J］. Catalysis Letters，2002，83（3）：235-239. doi:10.1023/a:1021066904862
60	CHOUDHARY V R， SANSARE S D， GAIKWAD A G. Direct oxidation of H₂ to H₂O₂ and decomposition of H₂O₂ over oxidized and reduced Pd-containing zeolite catalysts in acidic medium［J］. Catalysis Letters，2002，84（1）：81-87.
61	MELADA S， RIODA R， MENEGAZZO F，et al. Direct synthesis of hydrogen peroxide on zirconia-supported catalysts under mild conditions［J］. Journal of Catalysis，2006，239（2）：422-430. doi:10.1016/j.jcat.2006.02.014
62	高橋悠介，佐木慶介，高橋一重，等. 水処理装置、超純水製造装置、水処理方法及び再生型イオン交換塔：JP7012196B1［P］. 2022-01-27.
63	井上洋，山中弘次，鈴木陽代，等. イオン吸着モジュール及び水処理方法：JP5465463B2［P］. 2014-04-09.
64	TAKADA H， INOUE H， NAKAMURA A，et al. Synthesis and applications of monolithic ion exchange resin［J］. Journal of Ion Exchange，2014，25（4）：73-80. doi:10.5182/jaie.25.73
65	矢野大作，山下幸福，村山雅美，等. Substrate treatment method and substrate treatment equipment：US20210249259A1［P］. 2021-08-12.
66	SUNDSTROM GLEN P. Systems and methods for measuring composition of water：US20210181167A1［P］. 2021-06-17.
67	郑伟，杨光明，程星华，等. 一种气相定量测定亚ppb级污染物的方法：CN116380981A［P］. 2023-06-07.
68	佐佐木慶介，须藤史生，高橋一重，等. 過酸化水素除去方法および過酸化水素除去装置並びに純水製造装置：JP2022002829A［P］. 2022-01-11.
69	佐佐木慶介，阿部真弓. 水処理方法及び水処理装置：JP2022138431A［P］. 2022-09-26.
70	CAI Hanying， WU Qianyuan， OUYANG Wanyue，et al. Adsorption of low-molecular-weight carboxylic acids to anion exchange resins with various properties and the mechanisms of interaction［J］. ACS ES&T Water，2023，3（1）：60-69. doi:10.1021/acsestwater.2c00376

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