摘要：

单晶硅切削液废水具有COD高、可生化性差等特点。针对某单晶硅生产企业废水，目前拟采取将其在企业内经过气浮、生化、曝气生物滤池等工艺处理至达到接管标准后，与其他污水混合进入污水处理厂进行生化处理的措施，这存在着对下游污水处理厂水质冲击问题，影响其稳定运行。对此，在污水处理厂生化工艺段前增设臭氧催化氧化处理工艺段对废水进行预处理，以提升生化段进水水质。根据企业外排废水出水COD设置不同的臭氧投加量，连续运行15 d，分析了臭氧消耗量、出水COD和下游污水处理厂出水COD，结果表明，随着单位质量COD的臭氧投加量（臭氧投加比）的提高，出水COD显著降低，但过高的臭氧投加量会造成臭氧尾气破坏装置高负荷运行及高能耗。实验条件下，当臭氧投加比在0.98~1.39 mg/mg内变动，平均1.20 mg/mg时，臭氧工艺段出水COD平均为83 mg/L，下游污水处理厂最终出水COD平均为17 mg/L，实现了出水稳定达标。

关键词: 单晶硅切削液, 臭氧催化氧化, 臭氧投加比

Abstract:

Monocrystalline silicon cutting fluid wastewater has the characteristics of high COD and poor biodegradability. For the wastewater from a certain monocrystalline silicon production enterprise, it was planned to adopt measures such as treating it through processes such as air flotation, biochemistry, and aerated biofilter within the enterprise until it met the takeover standards, and then mixing it with other wastewater to enter the sewage treatment plant for biochemical treatment. This posed a water quality impact problem on downstream sewage treatment plant and affected its stable operation. Therefore, an ozone catalytic oxidation treatment process section was added in front of the biochemical process section of the sewage treatment plant to pre treat the wastewater, in order to improve the inlet water quality of the biochemical section. Different ozone dosages were setted based on the COD of the wastewater discharged from the enterprise. After continuous operation for 15 days, the ozone consumption, effluent COD, and downstream wastewater treatment plant effluent COD were analyzed. The results showed that as the ozone dosage per unit mass of COD (ozone dosage ratio) increased, the effluent COD significantly decreased. However, excessive ozone dosage could cause high load operation and energy consumption of the ozone exhaust gas destruction device.Under experimental conditions, when the ozone dosage ratio varied between 0.98 mg/mg and 1.39 mg/mg, with an average of 1.20 mg/mg, the average COD of the ozone treated effluent was 83 mg/L, and the final COD of the downstream sewage treatment plant was 17 mg/L, achieving stable effluent compliance.

Key words: monocrystalline silicon cutting fluid, ozone catalytic oxidation, ozone dosage ratio

中图分类号: 

• X703.1