Industrial Water Treatment ›› 2025, Vol. 45 ›› Issue (4): 10-16. doi: 10.19965/j.cnki.iwt.2024-0458

• SUMMARIES AND THESES ON SPECIAL TOPICS • Previous Articles    

Potential risks and removal characteristics of N-methyl-2-pyrrolidone in semiconductor wastewater

Xiaowen CHEN1(), Yinhu WU1(), Nan HUANG2, Zhuowei ZHANG1, Qi WANG1, Wenlong WANG3, Qianyuan WU3, Jianglei XIONG4, Jiahao LUO5, Hong YU4, Hongying HU1,6   

  1. 1. State Key Laboratory of Regional Environment and Sustainability, Key Laboratory of Microorganism Application and Risk Control, Ministry of Ecology and Environment, Beijing Laboratory for Environmental Frontier Technologies, School of Environment, Tsinghua University, Beijing 100084, China
    2. National Engineering Laboratory for Advanced Municipal Wastewater Treatment and Reuse Technology, Department of Environmental Engineering, Faculty of Environment and Life, Beijing University of Technology, Beijing 100124, China
    3. Key Laboratory of Microorganism Application and Risk Control of Shenzhen, Institute of Environment and Ecology Tsinghua Shenzhen International Graduate School, Tsinghua University, Shenzhen 518055, China
    4. China Electronics System Engineering No. 2 Construction Co. , Ltd. , Wuxi 214135, China
    5. Jiangsu China Electronics Innovation Environmental Technology Co. , Ltd. , Wuxi 214142, China
    6. Research Institute for Environmental Innovation(Suzhou), Tsinghua, Suzhou 215163, China
  • Received:2024-12-26 Online:2025-04-20 Published:2025-04-27
  • Contact: Yinhu WU

半导体废水中N-甲基-2-吡咯烷酮的潜在风险及去除特性

陈晓雯1(), 巫寅虎1(), 黄南2, 张倬玮1, 王琦1, 王文龙3, 吴乾元3, 熊江磊4, 罗嘉豪5, 于红4, 胡洪营1,6   

  1. 1. 清华大学环境学院,区域环境安全全国重点实验室,生态环境部环境微生物利用与安全控制重点实验室,环境前沿技术北京实验室,北京 100084
    2. 北京工业大学,城镇污水深度处理与资源化利用技术国家工程实验室,北京 100124
    3. 清华大学深圳国际研究生院,国家环境保护环境微生物利用与安全控制重点实验室,广东 深圳 518055
    4. 中国电子系统工程第二建设有限公司,江苏 无锡 214135
    5. 江苏中电创新环境科技有限公司,江苏 无锡 214142
    6. 清华苏州环境创新研究院,江苏 苏州 215163
  • 通讯作者: 巫寅虎
  • 作者简介:

    陈晓雯(1998— ),E-mail:

  • 基金资助:
    国家自然科学基金面上项目(52070110); 国家自然科学基金重大项目(52293442)

Abstract:

N-methyl-2-pyrrolidone(NMP), one of the typical organic compounds in the semiconductor wastewater with high concentration and difficult-to-degrade characteristics, has attracted critical attention of the semiconductor industry. Verifying the characteristics, potential risks and degradation properties of NMP in wastewater is of great significance for the efficient and low-consumption treatment of semiconductor wastewater. The study summarized the sources, concentration and toxicity of NMP in semiconductor wastewater, sorted out the treatment processes, removal effects and degradation pathways of NMP,and discussed the key problems of the existing treatment processes and corresponding solutions. NMP is mainly derived from cleaning agents in semiconductor manufacturing processes, with high concentration and biotoxicity in semiconductor wastewater. Currently, NMP treatment technologies have included physical separation, biological treatment and chemical degradation. However, there are challenges exist, such as incomplete removal and generation of intermediates with higher toxicity. In the future, research is suggested to be carried out on the development of detoxification process and the mechanism of degradation enhancement. It is necessary to focus on the industry chain to realize the whole process control of NMP risk from the aspects of process innovation at the source, resource recovery and enhanced treatment at the endpoint.

Key words: semiconductor wastewater, N-methyl-2-pyrrolidone, risk control

摘要:

N-甲基-2-吡咯烷酮(NMP)作为半导体行业废水中的典型有机物,具有浓度高、降解难等特点,已成为行业重点关注的污染物,所以探明NMP在废水中的赋存特征、潜在风险及降解特性对行业废水的高效低耗处理具有重要意义。总结了半导体废水中NMP的来源、浓度和毒性风险,梳理了NMP的主要处理工艺、去除效果和降解规律,探讨了现有处理工艺存在的主要问题及解决建议。NMP主要来源于半导体制造过程的清洗剂,在半导体废水中具有较高的浓度和较强的生物毒性。现有技术对NMP的处理包括物理分离、生物处理和化学降解等,但存在去除不彻底、产生高毒性中间产物等问题。建议从NMP脱毒工艺开发及强化去除机理等方面开展研究,并着眼于行业链条,结合源头工艺革新和资源化回收,实现对NMP风险的全过程控制。

关键词: 半导体行业废水, N-甲基-2-吡咯烷酮, 风险控制

CLC Number: