The discharge, recovery, and reuse treatments of integrated circuit industry wastewater

doi:10.19965/j.cnki.iwt.2023-0423

Industrial Water Treatment ›› 2024, Vol. 44 ›› Issue (4): 1-9. doi: 10.19965/j.cnki.iwt.2023-0423

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The discharge, recovery, and reuse treatments of integrated circuit industry wastewater

Zhuoyuan XIAO¹(), Nan HUANG²(), Yinhu WU¹, Zhuowei ZHANG¹, Yuqing XU¹, Qianyuan WU³, Wenlong WANG³, Jianglei XIONG⁴, Jiahao LUO⁴, Xiang LIAO⁴, Hongying HU¹^,⁵

^1. Environmental Simulation and Pollution Control State Key Joint Laboratory, Key Laboratory of Microorganism Application and Risk Control, Ministry of Ecology and Envirionment, Beijing Laboratory for Environmental Frontier Technologies, School of Environment, Tsinghua University, Beijing 100084, China
^2. National Engineering Laboratory for Advanced Municipal Wastewater Treatment and Reuse Technology, Department of Environmental Engineering, Faculty of Environment and Life, Beijing University of Technology, Beijing 100124, China
^3. Key Laboratory of Microorganism Application and Risk Control of Shenzhen, Tsinghua Shenzhen International Graduate School, Tsinghua University, Shenzhen 518055, China
^4. China Electronics System Engineering No. 2 Construction Co. ，Ltd. ，Wuxi 214135, China
^5. Research Institute for Environmental Innovation(Suzhou), Tsinghua, Suzhou 215163, China

Received:2024-01-25 Online:2024-04-20 Published:2024-04-17

集成电路废水的达标排放、资源回收和再生处理

肖卓远¹(), 黄南²(), 巫寅虎¹, 张倬玮¹, 徐雨晴¹, 吴乾元³, 王文龙³, 熊江磊⁴, 罗嘉豪⁴, 廖翔⁴, 胡洪营¹^,⁵

^1. 清华大学环境学院，环境模拟与污染控制国家重点联合实验室，生态环境部环境微生物利用与安全控制重点实验室，环境前沿技术北京实验室，北京 100084
^2. 北京工业大学，城镇污水深度处理与资源化利用技术国家工程实验室，北京 100124
^3. 清华大学深圳国际研究生院，生态环境部环境微生物利用与安全控制重点实验室，广东深圳 518055
^4. 中国电子系统工程第二建设有限公司，江苏无锡 214135
^5. 清华苏州环境创新研究院，江苏苏州 215163

作者简介:
肖卓远（1998— ），硕士。电话：13611229892，E-mail：xiaozy21@mails.tsinghua.edu.cn
黄南，副教授，博士。电话：15201524302，E-mail：huangnan@bjut.edu.cn。
基金资助:
国家自然科学基金重大项目(52293442); 国家自然科学创新研究群体项目(52221004)

Abstract

Abstract:

Integrated circuit industry is a strategic, fundamental and pilot industry that supports economic and social development. It has high water consumption and drainage. The quality characteristics of integrated circuit wastewaters were classified, including ammonia wastewater, fluorine wastewater, acid and alkali wastewater, organic wastewater, copper wastewater, and grinding wastewater. The treatment processes and technologies of up-to-standard discharge, pollutant resource recovery, and water reuse treatment of wastewater containing different pollutants were summarized. The physicochemical processes for up-to-standard discharge treatment included coagulation sedimentation, filtration and adsorption to treat fluorine-containing, copper-containing and grinding wastewater, and biochemical processes included hydrolytic acidification, internal circulation anaerobic reactor, AO, and membrane bioreactor to treat ammonia-containing and organic wastewater. Advanced oxidation and electrolysis technology received much attention in recent years. The resource recovery technologies for pollutants such as fluorine, copper and tetramethylammonium hydroxide in wastewater included ultrafiltration and electrodialysis. Wastewater reuse treatment technologies and processes included coagulation sedimentation, membrane bioreactor and filtration. Reverse osmosis was the core of wastewater reuse treatment, with the goal of producing industrial pure water for integrated circuit manufacturing. Finally, the problems faced in wastewater treatment were discussed. Corresponding control methods were suggested: improving the collection system, strengthening the removal of heavy metals and refractory organic pollutants to reduce the biological toxicity of wastewater, and using pretreatment, fouling monitoring, membrane cleaning, and developing new membrane materials methods to control reverse osmosis membrane fouling.

Key words: integrated circuit wastewater, up-to-standard discharge, resource recovery, reclamation, treatment technology and process

摘要：

集成电路产业是支撑经济社会发展的战略性、先导性产业，其用水量和排水量均较高。分析了集成电路废水的水质特征，主要包括各生产环节产生的含氨、含氟、酸碱、有机、含铜和研磨废水。针对含不同物质废水，总结了废水达标排放、资源回收和再生处理技术的应用现状与研究进展。在废水达标排放方面，实际工程中常采用混凝沉淀、过滤和吸附等处理含氟、含铜和研磨废水；采用活性污泥法、膜生物反应器、水解酸化和内循环厌氧反应器等处理含氨和有机废水；近年来磁混凝和高级氧化等技术也备受关注。在资源回收方面，目前主要采用超滤和电渗析等技术回收氟、铜和四甲基氢氧化铵等。废水回用方面，主要采用混凝沉降，膜生物反应器和膜过滤技术；反渗透技术是废水再生处理的核心，其目标是制备工业纯水用于集成电路制造。最后针对集成电路废水处理系统现存的问题，建议完善废水分类分质收集系统；强化去除重金属和难降解有机物，降低废水的生物毒性；使用预处理、污堵监测、膜清洗、开发新型膜材料等方法控制反渗透膜的污堵。

关键词: 集成电路废水, 达标排放, 资源回收, 再生处理, 处理技术和工艺

CLC Number:

X703.1

Zhuoyuan XIAO, Nan HUANG, Yinhu WU, Zhuowei ZHANG, Yuqing XU, Qianyuan WU, Wenlong WANG, Jianglei XIONG, Jiahao LUO, Xiang LIAO, Hongying HU. The discharge, recovery, and reuse treatments of integrated circuit industry wastewater[J]. Industrial Water Treatment, 2024, 44(4): 1-9.

肖卓远, 黄南, 巫寅虎, 张倬玮, 徐雨晴, 吴乾元, 王文龙, 熊江磊, 罗嘉豪, 廖翔, 胡洪营. 集成电路废水的达标排放、资源回收和再生处理[J]. 工业水处理, 2024, 44(4): 1-9.

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规模	处理工艺或技术	处理对象污染物	参考文献
实际工程	混凝沉淀	F^-、SS、Cu、COD等	〔8，25-27，30，33，35〕
	鸟粪石法沉淀	PO₄ ^3-、NH₄ ⁺	〔14〕
	过滤	Cu	〔27〕
	过滤-吸附	SS、F^-	〔26〕
	V型滤池-臭氧生物活性炭-吸附	COD、F^-	〔8〕
中试	鸟粪石法沉淀	F^-、PO₄ ^3-、NH₄ ⁺	〔18〕
中试	吸附-电解	H₂O₂、NH₄ ⁺	〔21〕
小试	鸟粪石法沉淀	Cu、NH₄ ⁺	〔36〕
	磁混凝	SS、Si	〔13，37〕
	吸附	DOC、四甲基氢氧化铵、Ga（Ⅲ）、Cu	〔38-42〕
	Fenton氧化	吡唑、二甘醇胺、丙酮、异丙醇、二甲基亚砜	〔43-45〕
	紫外线/电Fenton氧化	EDTA	〔46〕
	TiO₂/Fe₃O₄光催化氧化	异丙醇	〔47〕
	纳米臭氧/H₂O₂氧化	四甲基氢氧化铵	〔48〕
	MnCe活性炭/O₃/H₂O₂氧化	NH₄ ⁺、四甲基氢氧化铵、单乙醇胺	〔23〕
	电凝聚-电浮选	F^-、Cr（Ⅵ）、十二烷基硫酸钠、NH₄ ⁺	〔49-50〕
	电凝聚	Cu、F^-	〔51〕

规模	处理工艺或技术	处理对象污染物	参考文献
实际工程	混凝沉淀	F^-、SS、Cu、COD等	〔8，25-27，30，33，35〕
	鸟粪石法沉淀	PO₄ ^3-、NH₄ ⁺	〔14〕
	过滤	Cu	〔27〕
	过滤-吸附	SS、F^-	〔26〕
	V型滤池-臭氧生物活性炭-吸附	COD、F^-	〔8〕
中试	鸟粪石法沉淀	F^-、PO₄ ^3-、NH₄ ⁺	〔18〕
中试	吸附-电解	H₂O₂、NH₄ ⁺	〔21〕
小试	鸟粪石法沉淀	Cu、NH₄ ⁺	〔36〕
	磁混凝	SS、Si	〔13，37〕
	吸附	DOC、四甲基氢氧化铵、Ga（Ⅲ）、Cu	〔38-42〕
	Fenton氧化	吡唑、二甘醇胺、丙酮、异丙醇、二甲基亚砜	〔43-45〕
	紫外线/电Fenton氧化	EDTA	〔46〕
	TiO₂/Fe₃O₄光催化氧化	异丙醇	〔47〕
	纳米臭氧/H₂O₂氧化	四甲基氢氧化铵	〔48〕
	MnCe活性炭/O₃/H₂O₂氧化	NH₄ ⁺、四甲基氢氧化铵、单乙醇胺	〔23〕
	电凝聚-电浮选	F^-、Cr（Ⅵ）、十二烷基硫酸钠、NH₄ ⁺	〔49-50〕
	电凝聚	Cu、F^-	〔51〕

规模	处理工艺或技术	污染物（指标）	参考文献
实际工程	二级AO-膜生物反应器	NH₄ ⁺、COD	〔27〕
	水解酸化	BOD、COD	〔8，25〕
	内循环厌氧反应器	COD	〔25〕
中试	好氧膜生物反应器	二甲基亚砜	〔52〕
	好氧生物处理	四甲基氢氧化铵	〔53〕
	含膜系统的四段Bardenpho	COD、TN	〔22〕
	厌氧流化床膜生物反应器	二甲基亚砜	〔52〕
小试	共厌氧消化	四甲基氢氧化铵	〔54〕
小试	生物吸附	Cu²⁺	〔55〕

规模	处理工艺或技术	污染物（指标）	参考文献
实际工程	二级AO-膜生物反应器	NH₄ ⁺、COD	〔27〕
	水解酸化	BOD、COD	〔8，25〕
	内循环厌氧反应器	COD	〔25〕
中试	好氧膜生物反应器	二甲基亚砜	〔52〕
	好氧生物处理	四甲基氢氧化铵	〔53〕
	含膜系统的四段Bardenpho	COD、TN	〔22〕
	厌氧流化床膜生物反应器	二甲基亚砜	〔52〕
小试	共厌氧消化	四甲基氢氧化铵	〔54〕
小试	生物吸附	Cu²⁺	〔55〕

处理技术	回收污染物	参考文献
合成HF	CaF₂和废硫酸	〔56〕
胶束增强超滤	四甲基氢氧化铵	〔57〕
电渗析	四甲基氢氧化铵	〔58〕
电渗析	Cu	〔12〕
电化学结晶	P	〔59〕
流化床均相结晶	P、Cu和Co	〔60-61〕

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