摘要：

随着超纯水技术在半导体行业的应用日益广泛,半导体制造单位对超纯水的要求也越来越高。作者详述了超纯水的制造工艺及各个环节中所用不同工艺设备的对比。同时,还详细介绍了超纯水工艺流程中的节能减排措施。

关键词: 半导体, 超纯水, 节能减排

Abstract:

Ultra-pure water technology applied to the semiconductor industry becomes more extensive,and the requirements of ultra-pure water are getting higher and higher in semiconductor manufacturing companies. The ultrapure water treatment process and the contrasts of the different process equipment are made in detail. At the same time,the energy-saving and emission-reduction measures of ultra pure water are introduced in detail,as well.

Key words: semiconductor, ultra-purewater, energy-savingandemissionreduction

中图分类号: 

• TU991.41