摘要：

半导体行业废水水质复杂，携带大量重金属、有毒氰化物、氟化物、氮、磷等污染物，同时具有可生化性差、C/N低的特点，难以直接采用生物方法处理。某高新技术产业园区污水处理厂采用“格栅+曝气沉砂池+高效沉淀池+改良型A²/O+MBR+接触消毒池”的处理工艺，探究了该工艺实际运行5个月期间的进出水水质变化情况。运行结果表明，该处理工艺对进水中污染物均具有较好的去除效果，运行期间出水悬浮物、COD、NH₄ ⁺-N、TN、TP和氟化物等污染物分别维持在4、26、1、8、0.1、1.5 mg/L以下，始终满足《城镇污水处理厂污染物排放标准》（GB 18918—2002）一级A类标准。此外，水处理电费约0.536元/m³，药剂费用约0.220元/m³，直接运行成本约0.756元/m³。

关键词: 半导体行业废水, 氟化物, 可生化性, 改良型A²/O-MBR

Abstract:

The semiconductor industry wastewater is complex due to it contains large amount of pollutants such as heavy metals, toxic cyanide, fluoride, nitrogen, and phosphorus, etc. Meanwhile, the poor biodegradability and low C/N makes it difficult to directly use biological methods for treatment. The sewage treatment plant in a certain high-tech industrial park adopts the treatment process of “grille+aeration sedimentation tank+high-efficiency sedimentation tank+advanced A²/O+MBR+disinfection tank”. The changes of influent and effluent water quality during the actual operation for 5 months were explored. The results showed that the treatment process had a good removal effect on pollutants. During operation, pollutants such as suspended solids, COD, NH₄ ⁺-N, TN, TP, and fluoride in effluent were maintained below 4, 26, 1, 8, 0.1, and 1.5 mg/L, respectively, which always met the first level class A standards of Discharge Standard of Pollutants for Municipal Wastewater Treatment Plant (GB 18918-2002). In addition, the electricity cost of water treatment was about 0.536 yuan/m³, the chemicals cost was about 0.220 yuan/m³, and the direct operating cost was about 0.756 yuan/m³.

Key words: semiconductor industry wastewater, fluoride, biodegradability, advanced A²/O-MBR

中图分类号: 

• X703