摘要：

采用中和-混凝法处理三氯氢硅生产过程中的尾气洗涤废水。经实验确定最佳工艺条件：中和后的悬浮液pH 为7~9，混凝剂聚合氯化铝的投加质量浓度为30 mg/L，快速搅拌30 min，慢速搅拌40 min，静置60 min。实验结果表明：在最佳工艺条件下对废水进行处理，出水无色透明，浊度和SS 的去除率均在97%以上，SiO₂去除率在92%以上，可全部返至洗涤系统循环使用。

关键词: 中和, 混凝； 三氯氢硅, 废水处理

Abstract:

Neutralization-coagulation process has been applied to the treatment of tail gas washing wastewater from SiHCl₃ production. The optimum conditions are as follows：the pH of the suspending liquid after neutralization is 7-9，the mass concentration of coagulant polyaluminum chloride added dosage is 30 mg/L，fast stirring time is 30 min，slow stirring time is 40 min and standing time 60 min. The results show that the effluent water is colorless and transparent，its removal rates of SS，turbidity and SiO₂ are 97%，97% and 92% or more respectively，and the water can return to the washing system and be recycled completely

Key words: neutralization, coagulation, trichlorosilane, wastewater treatment

中图分类号: 

• X703